filling empty space in layout

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Junus2012

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Dear friends,

I am about to finish with my layout design, I have some some gaps in my lyout which I couldn't fill. I have also the upper part is wider than the down part. How can I fill the gaps and also to make my layout looks like one rectangular

Thank you very much
 

I like to fill with decoupling capacitors, which I make by
stacking metal layers over (say) 20/5 multifinger MOSFETs
for a parallel thin ox, thick ox plate set. This can be positive
for density checks and gives some improvement in chip
behavior (killing supply bondwire inductance somewhat).
I sometimes make this all part of the power supply bussing,
capacitors that underlap the bus-pair distributing the
decoupling throughout the part.
 
Most of foundries supply "tiling" tool to fill the empty spaces to improve the stress fragility.This is a special pattern that consists proper layers.
 

Dear freeBird,
Could you please refer me to an image to understand the connection more clearely, and thank you for your suggestion

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Most of foundries supply "tiling" tool to fill the empty spaces to improve the stress fragility.This is a special pattern that consists proper layers.

Dear bigboss,

how can I find this tool in Cadence

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By the way guys what about also filling some spaces with substrate contacts ?
 

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