The process is M9_6X2Z, which means it has 9 metals, the first six are of the type X and the next two are of the type Z. Most likely you are designing with the wrong stack. The most popular stack for TSMC 65 is 6X1Z1U, just so you know, as it is used in MPWs quite often.
In any case, you gotta make sure your design matches your DRC/LVS deck configuration. Do not take the decks for granted, open the rules file and inspect them in a text editor to make sure it matches the stack that you think it should be. Do the same with the techlef you are using in Innovus or the .tf file in Virtuoso.