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challenges in lower technologies

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Yathin P U

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What are the challenges faced as we move from higher to lower technologies in layout perspective (for example 180nm -> 90nm ->45nm etc)
 

Dear

the most challenge is the matching in the layout of the small technology. the higher geometry devices leads to have better matching.
 

Common challenges are:
1. LOD
2. WPE
3. DFM
4. Diffusion proximity effects
5. Optical proximity correction related rules
6. DIBL
7. Hot electron effect
etc..

For each topic you will get materials if you search in Google.
Let me know if you need any help with searching.

Regards,
Venky
 
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