Capacitor value extraction

[cmos_dude]

Hi
I am doing a layout of a mim capacitor, and am getting property mismatches in the layout and source. This made me courious about the way calibre calculates the value from the layout. According to me, an mim cap value is calculated as per the expression below.

Cap = C1*Area + C2*Perimeter

Is this way the right one, and if yes, where can I find the values of this C1 and C2 ???

Regards
Cmos_Dude

 

[renwl]

you can find it in the process manual provided by foundry.

 

[cmos_dude]

I could not
can you please help me where can I locate it.
I am using a TSMC 130nm process!!!

--cmos_dude

 

[leo_o2]

Maybe you can check your calibre command files. To debug this, please provide how much difference for your case. If it is less than what you can accept, you can increase the tolerance in the command file and get pass. For very accurate, you also need to check if any non-regular shape exists. For example, the area and perimeter calculation might lead to this difference.