Antenna ratio in antenna effect

[saha.123]

Hi......

Antenna ratio(AR) is the ratio of exposed conductor area/perimeter to gate to the area of gate.In this case,confused with "exposed conductor". For example, the gate is connected to metal1 through poly using contacts.Here, which one is "exposed conductor" with respect to gate.(whether its poly or metal1).

thanks in advance......
regards
saha

 

[erikl]

Exposed is just the layer to be etched during the respective etching step. During the following metal etch steps, however, the exposed areas are already connected to the lower layer routes, hence the total connected route down to the gate will be charged.

So for each etch step, the total route area down to the gate counts, I'd think.