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13.56MHz Generator connect via Matching network to Plasma chamber. Cable Length.

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psdonald

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Hello,

I have a 50ohm 13.MHz Generator.
I have a 50Hm input matching L network.
The Cable from the Generator to the network is 1 λ. (50ft 0.6VF)
Now the question.
The match cannot be connected very closely and has another output coax that I was told should be a 1/16λ length. (38.1" 0.7VF). Other sources say to make it as short as possible. The shortest i could make it would be 30". Should I go for 1/4λ after the match?

Should the output cable be included in the 1λ length and the input cable shortened by that amount.

Thanks
Peter
 

chuckey

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You do not say what the power is or the input impedance of the plasma chamber. I would put the matching network as close to the chamber as possible and most importantly tune it for minimum reflected power to the generator.
Frank
 

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