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  1. #1
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    [m]What is the difference between "Damascene copper" interconnect and normal copper ?

    Hi,

    What is the difference between "Damascene copper metal interconnect and normal copper interconnect" ?

    What are the advantages of using "Damascene copper" as a top level metal in VLSI chip design ?


    Thanks in advance,
    Rohith

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  2. #2
    Advanced Member level 5
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    Re: [m]What is the difference between "Damascene copper" interconnect and normal copp

    It has to do with deposition. You create holes and overdeposit on top of it to fill the holes. I am not a process guy, but my understanding is that dual-damascene is the standard today, meaning that you deposit vias and metal at the same time.
    Really, I am not Sam.


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