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RF Simulations of MEMS Cantilever switch

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MEMS_rules

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cantilever mems

Hi all,
I am currently designing a cantilever MEMS switch for which i need to examine the variation of RF parameters like Insertion Loss, Isolation loss etc (wrt to frequency) by varying some of its parameters like length of actuation area, normal gap height. I want to simulate the same in HFSS. The current of s/w in which i am working (HFSS v9.2) doesnt talk anything abt RF simulations. Please help how do i proceed. I have 3 lumped elements in my circuit. (R, L, C)

How good is ADS and AWR compared to HFSS. am not proficient in these.
 

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