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Metal layer thikness 65 nm

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AdvaRes

AdvaRes

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Hi all,
Could somebody tell me where can I find information about the thinkness of metal layers in the 65 nm Technology ?
In need this information to calculate the capacitance coupling.
Thanks in advance.
 

If you have the design kit manual, these data is available.

---------- Post added at 17:44 ---------- Previous post was at 16:22 ----------

M1 0.15um

M2-M5 0.34um

M6-M7 0.85um
 
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AdvaRes said:
Hi all,
Could somebody tell me where can I find information about the thinkness of metal layers in the 65 nm Technology ?
In need this information to calculate the capacitance coupling.
Thanks in advance.
Click to expand...
This of course depends on which foundry and metal stack options you use.

Assuming you have a PDK you should have these info in
- design manual
- parasitic extraction rules (e.g. PEX, QRC)
- ITF files
- nxtgrd files
- ...
some of the above could be encrypted
 
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There may be a little bit of change, But these values are quite accurate for first phase of design.
 

Thank you guys.

Actually precision is not veryy important I'll do a simulation with matlab. It's only to see the behaviour of signals (delays, voltage drop, agression etc) in wires. Hence a precise process is not important however if info comes from a foundry it will be great ;) .
I'll write a paper on that issue so I'll need to indicate a reference in my paper. Coud you please refer me to a document where I can get this info. I need only to know the thikness of the metal it is not a secret I suppose.

Thanks in advance guys.
 

AdvaRes said:
Thank you guys.
Coud you please refer me to a document where I can get this info. I need only to know the thikness of the metal it is not a secret I suppose.
Click to expand...

Those data are not secret but they are confidential, if I were you I would not publish a reference to the exact foundry data w/o consent

You might be better off referring to a 65nm process once you have your data
 
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