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#TITLE: EEPROM cell formation example
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line x loc=0.0 spac=0.005
line x loc=0.032 spac=0.00125
line x loc=0.045 spac=0.0025
line x loc=0.075 spac=0.01
#
line y loc=0.00 spac=0.0005
line y loc=0.015 spac=0.0015
line y loc=0.1 spac=0.0125
#
init c.boron=3e16 orientation=100...
Hi everyone,
I am new on silvoco TCAD,i am designing a device on it of 32nm fgmos but the problem here is "lateral diffusion" and the junction is not finding properly,
the command i used for it is
implant arsenic dose=1e15 energy=10
pleaase suggest me proper command that i can use to implant n...
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