Amy25
Member level 1
Hi,
Why we need to satisfy the via max/min density in layouts? Only metal density requirement is not sufficient? What is the effect of vias in fabrication/CMP is considered. or any other reason for via density requirement
Why we need to satisfy the via max/min density in layouts? Only metal density requirement is not sufficient? What is the effect of vias in fabrication/CMP is considered. or any other reason for via density requirement
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