what is the feature size, gate length or gate pitch?

[godsun]

gate pitch

i thought it is length size of gate。
but someone told me it is half pitch recently

intel's 65nm tech, effect gate length is 35nm, gate pitch is 220nm and
half pitch is 220/2 = 110?

i confused and don't know which one is correct

 

[mubeen630]

half pitch and gate length

Please check out the link below. It explains the pitch and gate length for NMOS.

**broken link removed**

 

[anmolvlsi13]

gate-pitch and half-pitch

feature size is nothing but the Gate length.

Anmol

 

[dsairajkiran]

gate length half pitch

feature size and gate length are one and the same.This represents the technology we
are working with.