Question about silicide and non-silicide sheet resistance

[flysnows]

silicide is used to increase the resistance, but i find that in my 0.18um model file the non-silicide sheet resistance is higher than silicde sheet resistance, can anyone tell me why? is it wrong in the model file?

 

[rajanarender_suram]

about silicide

No Silicide is used to decrease the resistance not increase

 

[forkschgrad]

Re: about silicide

it is the resistance of the underlying layer of silicide was increased. right?

 

[srieda]

Re: about silicide

silicide is used to increase the resistance, but i find that in my 0.18um model file the non-silicide sheet resistance is higher than silicde sheet resistance, can anyone tell me why? is it wrong in the model file?

Silicide layer reduces the resistance.. thus non-silicide layers have a higher sheet resistance..

 

[cmos_dude]

Re: about silicide

silicide is used to increase the resistance, but i find that in my 0.18um model file the non-silicide sheet resistance is higher than silicde sheet resistance, can anyone tell me why? is it wrong in the model file?

The resistance of a salicided area is less than that of the non salicided part.

This might be a bit confusing if you are a layout engineer and have been using salicide layers during your work. The salicide layer that you add during layouts is a negative mask (better known as salicide blockage) and hence is used to remove the salicide from particular areas in the layouts (usually done on the ESD devices).
This way, you are not adding a salicide layer, but removing it and in turn increasing the resistance.

I hope this clarifies the doubts.

--cmos_dude

 

[ameed]

Re: about silicide

hi all,

The resistance of a silicided area is less than that of the non silicided part.

This might be a bit confusing if you are a layout engineer and have been using silicide layers during your work. The silicide layer that you add during layouts is a negative mask (better known as silicide blockage) and hence is used to remove the silicide from particular areas in the layouts (usually done on the ESD devices).
This way, you are not adding a silicide layer, but removing it and in turn increasing the resistance.

I hope this clarifies the doubts.

thanx

 

[joe_chen]

Re: about silicide

silicide resistor is smaller than no silicide