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Q3D modeling of a via array in a semiconducting substrate

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Sherwin99

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I seek to model an array of copper vias embedded in a doped silicon wafer of conductivity 10^4 S/m in Q3D Extractor. With this level of conduction in the substrate what is the appropriate way to model this element? Should a source and sink be applied to the silicon and if so where? It would seem adding a source and sink to the top and bottom of the substrate would arbitrary force a conduction path vertically that may not truly exist.
 

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