Overview of nanolithography methods

[reza56]

nanolithography is a basic work in future integration
we have some famous method,they are as follows:
1)dip pen nano lithography
2)EUV nanolithography.
3)electron beam nanolithography.
4)X-ray beam nanolithography.
5)Ion-beam nanolithography.

but now I want to have a general overview of the ayatems that implement these technologies.

 

[elvis09]

Re: nanolithography

Hi reza56,

take a look at the EPFL (switzerland) site about papers on nanolithography process, like nanostencil :
**broken link removed**

You can also take a look at the pdf documents :
https://www.phantomsnet.net/files/EUprojects/BUN.pdf
**broken link removed**
**broken link removed**

or you can type keywords in the search motor engine of the web site of these labs:
IBM Zurich,
EPFL Lausanne,
LAAS France,
CEMES France

Kind regards,

Elvis

nanolithography is a basic work in future integration
we have some famous method,they are as follows:
1)dip pen nano lithography
2)EUV nanolithography.
3)electron beam nanolithography.
4)X-ray beam nanolithography.
5)Ion-beam nanolithography.

but now I want to have a general overview of the ayatems that implement these technologies.

 

[Aircraft Maniac]

nanolithography

Are you interested in learning how to design ebeam lithography machine with all electronmagnetic lenses and ultra high vacuum chambers?