Dido_Huang
Newbie level 1
h2 alloy
In 0.18LG process, H2 alloy post metal etch will bring metal voids issue. Why?The temperature or the H2 cause it? Pls give me your comments,TKS.
In 0.18LG process, H2 alloy post metal etch will bring metal voids issue. Why?The temperature or the H2 cause it? Pls give me your comments,TKS.