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cwcwecan said:First, You should have the process parameters
(e.g. Si:Er=11.9, Loss Tangent, and hight
Every Poly's , Loss Tangent, and hight
Every Metal's conductivity)
Then, Import the inductor's gds file to the EM simulator and Key in the process parameter above.
You can use @DS's momentum, Sonet, HFSS, Microwave Office, IE3D as your EM Simulator. According to my experiences, if the process parameters are right, you can get simulation results exactly.