did anyone know how to draw layout of passive capacitor?

[fareast]

i need to draw a layout of a couple of passive capacitors.can anyone teach me how to draw it?my capacitors value is about 100pF to 500pF.i have another option to draw using parasitic capacitance but i don't know how to calculate w/l.is there any notes or tutorial that i can refer to?fyi,it's hard to get a better book in vlsi design in my country.

 

[Syukri]

Check out journal for IPI and MIM capacitor..i think it's better.

If u wanted to used parasitic it's influenced by Cox where it's = tox/εox.

So it will be very small thus u need large layout for value such as 100p

 

[Robert Qi]

mix siganl design rule will tell you how to draw the mim cap, which is generally used to implement big caps.

 

[ee484]

art of analog layout

is a good reference for layout...

 

[piao]

MIM cap or the poly-to-poly cap are your choice, but you need to confirm if this process can support that.