BORON ION implantation procedure in TCAS sentaurus

[vijaymems]

i am learining a TCA sentaurus tool , but i am not able to find the exact and easy procedure hoe i can do implantation and how i can find the sheet resistance and junction depth .......
please suggest which tool i should use first ligament /process/structure editor ????? or command mode how i can do simualtion give details...........

 

[karishma.istk]

Hello frend

First of all tools start with Sentaurus workbench it is the integrative platform for other tools than move on to Sprocess(Sentaurus Process) for processing part device simulation tool (Sdevice ) than.