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about spacings - ndiff-to-pdiff spacing, metal-metal

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sevid

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about spacings

hi

there is 3 questions here

1 why is ndiff-to-pdiff spacing so large?
2 why is metal-metal spacing larger than poly-poly spacing?
3 why is metal2-metal2 spacing larger than metal1-metal1 spacing?

plz help me!

and thanks in advance !

sevid
 

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