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[SOLVED] what does "W/S" stand for in the layer specifications?

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I'm going through the TSMC pdk documents to understand more about the process and layout design and

there's a page with a figure of the cross-section of a specific process.

It looked like this picture
IMG_20140608_022935.jpg

what does the "W/S" stand for???
 

I think it should mean width/height.
 

I think it is width/spacing because metal layers are mentioned
 

johnjoe said:
I think it is width/spacing because metal layers are mentioned
Click to expand...

You're right. - I thought of sheet resistance [Ω/⃥], but this has quite a different dimension.
 

THANKS!

It does look like width/spacing.

To be specific, it means "minimum' width and spacing of the corresponding layer.

I accidentally came across the minimum width and spacing info in another section of the document and it turned out to be identical with the W/S shown in the figure.
 

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