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assura lvs error with tsmc autofilling tool (no error when dummy metal not merged)

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guow06

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I am using tsmc90nm. I use autofilling tool provided by tsmc to do filling. When I didn't merge the dummy metal created by that tool, my lvs was correct. But when I merged it, mimcaps and several pins were not correctly bonded. Any idea why? ( My lvs with the merged dummy metal used to be correct). And my drc is clearn.
 

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