pancho_hideboo
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In document of TSMC 0.18um CMOS, I can see the following description about Current Density Specification.
I can not understand what this description mean.
Can you teach me what this description mean physically ?
It's nominal AlCu thickness instead of genuine total thickness.
Jrms is root-mean-square current density through a metal line.
The numbers given below are for <10degC Joule heating.
Jrms <= 8 mA/um(= 2e6 A/cm^2) for M1
Jrms <= 4 mA/um(= 1e6 A/cm^2) for M2 to M5
Jrms <= 8 mA/um(= 1e6 A/cm^2) for M6
I can not understand what this description mean.
Can you teach me what this description mean physically ?