dinesh hegde
Member level 2
sheet resistance of metals
Hi,
Why sheet resistance of matsl varies as the width of metal increases. (According to theory sheet resistance should remain constant).
Reasons that I could think of,
1. Thickness variation because of CMP.
2. Width reduction factor may be different for different width of metals.
Regards,
Dinesh
Hi,
Why sheet resistance of matsl varies as the width of metal increases. (According to theory sheet resistance should remain constant).
Reasons that I could think of,
1. Thickness variation because of CMP.
2. Width reduction factor may be different for different width of metals.
Regards,
Dinesh