Continue to Site

Welcome to EDAboard.com

Welcome to our site! EDAboard.com is an international Electronics Discussion Forum focused on EDA software, circuits, schematics, books, theory, papers, asic, pld, 8051, DSP, Network, RF, Analog Design, PCB, Service Manuals... and a whole lot more! To participate you need to register. Registration is free. Click here to register now.

Register Log in

Need information on trench construction

Status
Not open for further replies.
L

layout_designer

Member level 5
Joined
Jan 9, 2006
Messages
87
Helped
14
Reputation
28
Reaction score
6
Trophy points
1,288
Activity points
1,869
trench

Hi
how is a trench constructed?
What layers are used?
How is it useful in latchup protection?

Will be grateful if anyone would enlighten me.
Thanks
 

Re: Trench Construction

Very quick.

-mask
-plasma etching
-fill with SiO2
-fill with polysilicon

**broken link removed**

A deep trench is like a wall, it prevents parasitic currents making the chip less sensitive to LU. STI has no effect on LU.

Son.
 

    V

    Points: 2
    Helpful Answer Positive Rating
Status
Not open for further replies.

Similar threads

Part and Inventory Search

Welcome to EDABoard.com

Sponsor

Back
Top