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Why poly silicon is used at the gate of mos?

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sabu

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y poly silicon is used at the gate of mos,shall i know the reason from u



thanks in advance
sabu
 

ssuchitav

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Re: poly silicon

HI!

Two reasons i know at this time..

1) no electromigraton
2) accuracy of VT ( Threshold voltage)

others u can collect from VLSI Technology by S.M.Sze and VLSI fabrication principles by S.K. Gandhi.
 

sabu

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poly silicon

plz help me how 2nd happens
 

mobie

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poly silicon

self-align
 

safwatonline

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poly silicon

poly can be heated in very high temp. will metal "as Al" will propably diffuse through silicon "i think this is the main reason", poly can be doped and hence we can control its c/c's Vth .
poly is bad in terms of conductivity "smaller than metal", i think that we may return to metal eventually when the VLSI technology advances more and more.

Added after 1 minutes:

btw the diffusion of Al in silicon is bcause AL is soluble in Si "i think so is Cu"
 

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