Dec 13, 2007 #1 S SP24 Junior Member level 3 Joined Oct 5, 2007 Messages 30 Helped 3 Reputation 6 Reaction score 3 Trophy points 1,288 Activity points 1,476 Can any one tell me about the significance of RPO layer?
Dec 13, 2007 #2 S shrbht Full Member level 1 Joined Mar 15, 2005 Messages 95 Helped 2 Reputation 4 Reaction score 0 Trophy points 1,286 Activity points 1,872 rpo layer resist protection oxide Is it salicide blocking layer? It's blocking the salicide , it can be used in poly-resistor,diffusion-resistor and ESD protection device,such as diode , mosfet . Pls correct me if I'm wrong. thanks
rpo layer resist protection oxide Is it salicide blocking layer? It's blocking the salicide , it can be used in poly-resistor,diffusion-resistor and ESD protection device,such as diode , mosfet . Pls correct me if I'm wrong. thanks
Dec 17, 2007 #3 S sunny153 Member level 2 Joined Mar 29, 2005 Messages 46 Helped 1 Reputation 2 Reaction score 0 Trophy points 1,286 Activity points 1,603 layer rpo ya, its a silicide blocking layer to increase/maintain the resistivity of poly res mainly.
Dec 17, 2007 #4 2 2steps Newbie level 6 Joined Aug 3, 2006 Messages 13 Helped 0 Reputation 0 Reaction score 0 Trophy points 1,281 Activity points 1,352 resist-protection oxide silicide Yes, it is a silide blocking layer, which is named "SAB" in SMIC mapping layers, and its mask tone is dark.
resist-protection oxide silicide Yes, it is a silide blocking layer, which is named "SAB" in SMIC mapping layers, and its mask tone is dark.
Dec 24, 2007 #5 V vijay.kumarreddy Member level 4 Joined Jan 6, 2006 Messages 78 Helped 12 Reputation 24 Reaction score 9 Trophy points 1,288 Location Bangalore,India Activity points 2,017 smic sab resistor Its called Resist protection oxide(RPO) used for non salicided area definition.