what is the use of buffer layer Silicon Nitride

[praveen_akshay]

what is the use of buffer layer Silicon Nitride in CMOS VLSI fabrication

 

[electronics_kumar]

it is a oxide elemnet in GATE terminal as a substitute for silicon di oxide....since it is having dielectric constant ,it reduces threshold voltage of MOS device which leads to low power consumption as well as speedy response..hope it is correct...

 

[demodb]

i think it used for selective oxidation. silicon oxide will not grow on silicon nitride so it can be used as a sort of mask.

 

[bjeservice]

silicone nitride make use of a layer of Si3N4 and SiO2 whose dielectric constant is about twice that of SiO2 aloneso Vt could be deacresed in MOS device

Added after 47 seconds:

silicone nitride make use of a layer of Si3N4 and SiO2 whose dielectric constant is about twice that of SiO2 alone ,so Vt could be deacresed in MOS device