What is the meaning of the term 'Impurity Profile'?

[rahul.6sept]

Dear Everybody,

I would like to know the meaning of term 'Impurity Profile' and its significance in the study of diffusion process of a semiconductor.

Thanking in advance.

Regards,
rc

 

[yadavvlsi]

Impurity profile gives the distribution of diffusion atoms inside the semiconductor. Diffusion of atom decides various proprieties of semiconductor conductivity and mobility. This also helps in calculating diffusion time.
Diffusion of Impurities for IC Fabrication

 

[erikl]

An 'Impurity Profile' (in semiconductors) is the dopant ions' concentration versus the depth in the semiconductor. The profile depends on the doping method (diffusion, implantation) and its environmental conditions. Doping methods and their significance for device behavior is extensively described in any book about semiconductor physics, like e.g. S.M. Sze, Physics of Semiconductor Devices. New York, Wiley, 1981 , and, occasionally -- to a lesser extent -- in books about circuit design, as e.g. Allen/Holberg "CMOS Analog Circuit Design".