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What is the DNW layer in tsmc090 ?

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pervanah

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hi :)
about the process of the tsmc090
what is the DNW layer (layer no.3)?
where is the active layer ?

i want to know these informations to be able to write the calibre lvs rule file defining the devices !!!

thx :):?:
 

Re: tsmc090 layers

pervanah said:
hi :)
about the process of the tsmc090
what is the DNW layer (layer no.3)?
where is the active layer ?

i want to know these informations to be able to write the calibre lvs rule file defining the devices !!!

thx :):?:

DNW is deep n well
active layer : DIFF
 

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