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what is PMET layer in 28nm tsmc technology ? it covers entire p+ implantation. ?

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vivekrajeev

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Hi
what is PMET layer in 28nm tsmc technology ? it covers entire p+ implantation. ?May i know what is its use ?

Thanks

Vivek
 

saurabhr8here

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I think the PMET or P-type Metal layer is used to specify areas where you'll have PFET High-K metal-gate (HKMG). HKMG materials are different for P and N type and this layer specifies the P-type metal gate locations. This is based on my reading of the DRM and I'd advise you to talk to your point of contact at TSMC for a more detailed explanation.
 
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