what is advantage/disadv. of sidewall spacers in MOS transis

[amitjagtap]

hi all
I want to know Whether sidewall spaces are intentionally added or these are there because of fab process.
also i want know the advan & disadv of sidewall spacers in MOS transistor.
Thanking you.

 

[animagus]

Re: what is advantage/disadv. of sidewall spacers in MOS tra

I think sidewall spaces are intentionally added. They have a specific formulae and floor plans according to which these sidewall spaces are chosen so as to obtain a specific capacitance. You can refer to MOSIS website for more information. Every technology has specific parameters to define the sidewall spaces.
Thanks.
Regard.

 

[amitjagtap]

hi
its ok, but I want to know physics behind addition of sidewall spacers.