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what is advantage/disadv. of sidewall spacers in MOS transis

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amitjagtap

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hi all
I want to know Whether sidewall spaces are intentionally added or these are there because of fab process.
also i want know the advan & disadv of sidewall spacers in MOS transistor.
Thanking you.
 

Re: what is advantage/disadv. of sidewall spacers in MOS tra

I think sidewall spaces are intentionally added. They have a specific formulae and floor plans according to which these sidewall spaces are chosen so as to obtain a specific capacitance. You can refer to MOSIS website for more information. Every technology has specific parameters to define the sidewall spaces.
Thanks.
Regard.
 

hi
its ok, but I want to know physics behind addition of sidewall spacers.
 

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