Pocket implants are used to avoid Punch through effects in short-channel devices. they are heavily doped (unlike LDD) small regions of substrate at the edges of drain and source regions to avoid depletion regions of drain and Source to pronounce into channel
Pocket implants are used to avoid Punch through effects in short-channel devices. they are heavily doped (unlike LDD) small regions of substrate at the edges of drain and source regions to avoid depletion regions of drain and Source to pronounce into channel