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tsmc epi layer option, which epi is better to prevent latchu

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lionking819

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epi resistance

I was told by TSMC person that they have two epi layer option to select
1. normal epi (resistance 6-8Ohm)
2. special epi (no doping, really high resistance and thinner than normal epi)
does anybody use the special epi layer before?
to prevent latchup, which one is better?

thanks
 

Re: tsmc epi layer option

lionking819 said:
... to prevent latchup, which one is better?
I'm not absolutely sure, but from physical reason the lower-resistance epi should be better. The higher-resistance epi layer is for HV applications ( > 5V ).
 
tsmc epi layer option

lower resistance epi is better to prevent latch-up
 

tsmc epi layer option

erik is correct.. because lower the resistance more will be current required to trigger the parasitic SCR......
 

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