tsmc 0.13 substrate resistivity

[totowo]

hi everybody,
is there someone kind to tell the substrate resistivity(Ohm.cm) of tsmcrf 0.13?
I want to take a EM simulation with momentum but i cannot find the param in tsmc docs.

Many thanks~

 

[penghan]

11 ~ 12

 

[kovibb]

it's epitaxy layer resistivity, no substrate resistivity

 

[ritchyv]

Hi,
Can you give me the name of this document ?
I've signed the NDA document but i don't find the epitaxy layer resistivity information

thx