Thin oxide = gate oxide is exclusively to be used for the gates. Substrate contact = NMOS body contact needs metal1 over it. Any oxide between would prevent the contact.I was asked to cover the substrate contact with thin oxide which also cover the body of transistor
Are you talking about drawn layers in a layout tools or something else?I was asked to cover the substrate contact with thin oxide which also cover the body of transistor
anybody know why to do it?
what do you mean by "body of NMOS/PMOS": the whole FET (including gate, source and drain) or the body/bulk contact?what I mean is when doing layout
you have the layer called thinox(thin oxide)
you will found it cover the body of NMOS/PMOS
why should I cover the NMOS/PMOS together with its body contact with one thinox?
what is the advange