ericcouyang
Newbie level 1

hi,
i have a linear array (say it total 50) of mems devices. you can image each mems device has dimension around 100umx100umx10um and the pitch is around 300um. these devices need to be excited by high electric field (V/m) electromagnetic (microwave) wave in one direction, for example, in x direction (and by wave only, not by direct electrical wire contact). Higher electrical field is preferred. Frequency can be a few GHz. I am thinking to use striplines structure to excite the array of mems devices. Can anyone suggest me the striplines configuration to excite an array of mems devices? the desired design is to use as fewer microwave sources as possible because of space and cost concern. and how do i keep the electrical field locally, because emi will be a concern if the field leak out to nearby devices. Any inputs/suggestions is appreciated. Thanks alot from Eric
i have a linear array (say it total 50) of mems devices. you can image each mems device has dimension around 100umx100umx10um and the pitch is around 300um. these devices need to be excited by high electric field (V/m) electromagnetic (microwave) wave in one direction, for example, in x direction (and by wave only, not by direct electrical wire contact). Higher electrical field is preferred. Frequency can be a few GHz. I am thinking to use striplines structure to excite the array of mems devices. Can anyone suggest me the striplines configuration to excite an array of mems devices? the desired design is to use as fewer microwave sources as possible because of space and cost concern. and how do i keep the electrical field locally, because emi will be a concern if the field leak out to nearby devices. Any inputs/suggestions is appreciated. Thanks alot from Eric