VLSI_Learner
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I was reading double patterning. And came to know that dividing the mask into two for lithography is basically called double patterning. But there are some reasons for doing this. One reason was sited like this: (can't remember the proper wording but trying to write what I remember and understood)
"The UV light that is used for lithography has certain wavelength. And the technology node is too small as compared to the wavelength of the UV light. And hence proper lithography result can't be achieved."
I really didn't get what the technology nodes mean and what relation technology nodes bear with UV light wavelength. Please explain this with proper examples.
"The UV light that is used for lithography has certain wavelength. And the technology node is too small as compared to the wavelength of the UV light. And hence proper lithography result can't be achieved."
I really didn't get what the technology nodes mean and what relation technology nodes bear with UV light wavelength. Please explain this with proper examples.