wmj2011
Newbie level 4
I'm doing simulation of phemt using ATLAS SILVACO.
I refer to the HEMT examples database in SILVACO;
why is the delta doped material defined as the same material of the Supply and Spacer layer (AlGaAs) when it should be a Silicon doping layer? why it's not defined as Silicon? Anyone can help me with this? Thanks
Previously, I tried to use the following command to model the Si-doped layer. Is that correct?
doping material=Si gaussian peak=0.0305 n.type conc=2e19 char=10e-4
And for the material layer, I defined th supply, delta doped and spacer layer as the following (I'm using InAlAs):
region num=4 name="Supply" material=InAlAs y.min=0.000 y.max=0.030 x.comp=0.48
region num=5 name="Delta" material=InAlAs y.min=0.030 y.max=0.031 x.comp=0.48
region num=6 name="Spacer" material=InAlAs y.min=0.031 y.max=0.041 x.comp=0.48
I refer to the HEMT examples database in SILVACO;
why is the delta doped material defined as the same material of the Supply and Spacer layer (AlGaAs) when it should be a Silicon doping layer? why it's not defined as Silicon? Anyone can help me with this? Thanks
Previously, I tried to use the following command to model the Si-doped layer. Is that correct?
doping material=Si gaussian peak=0.0305 n.type conc=2e19 char=10e-4
And for the material layer, I defined th supply, delta doped and spacer layer as the following (I'm using InAlAs):
region num=4 name="Supply" material=InAlAs y.min=0.000 y.max=0.030 x.comp=0.48
region num=5 name="Delta" material=InAlAs y.min=0.030 y.max=0.031 x.comp=0.48
region num=6 name="Spacer" material=InAlAs y.min=0.031 y.max=0.041 x.comp=0.48