Referencees about LIGA process

[Fractional-N]

plastic moulding -china

---I didn't know where to post this topic, so I placed it here!!!

Anyone know a good article or book that explains LIGA process
I searched the internet but I found nothing much useful!
for example I found this site:
**broken link removed**
it has a short description of process which is not useful for me

I found this article too, it is the very first article to introduce LIGA can anyone upload it for me??

*****
Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
Source Microelectronic Engineering archive
Volume 4 , Issue 1 (May 1986) table of contents
Pages: 35 - 56
Year of Publication: 1986
ISSN:0167-9317
Authors
E W Becker
W Ehrfield
P Hagmann
A Maner
D Münchmeyer
Publisher
Elsevier Science Ltd. Oxford, UK, UK

*****

 

[sreevyas]

Re: about LIGA???

Hi!
Microfabrication by Marc Madou
is good book for LIGA

__sree

 

[microfabrication]

Re: about LIGA???

A very thorough book on LIGA is"Microsystem Technology" by the inventers of the process, W. Menz, J. Mohr, and O. Paul; Wiley-VCH, 2001. ISBN 3-527-296334-4.
For further questions on LIGA, you can refer to my homepage at:
**broken link removed**
or pm me.

Matt Tayfeh

 

[microfabrication]

Re: about LIGA???

Also, recently:

LIGA and Its Applications
By Volker Saile (Editor), Ulrike Wallrabe (Editor), Osamu Tabata (Editor), Jan G. Korvink (Editor), Oliver Brand (Series Editor), Gary K. Fedder (Series Editor), Christofer Hierold (Series Editor)

Wiley-VCH, Print ISBN: 9783527316984 , Online ISBN: 9783527622573, 2009.

**broken link removed**

http://www.amazon.com/LIGA-Applicat...=sr_1_1?ie=UTF8&s=books&qid=1262817331&sr=8-1