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I also thought this method.But i have doubt whether laser like coherent sources can be able to sense this much small distances(in microns).i searched in net and the idea i got is it is useful for large distance.I cant find small distance case.what about ur opinion sir?and would u please give me an idea of its sensitivity if we can laser source method?
Besides interferrometry, that can easily measure 0.1 um, triangulation is a possible alternative for short distance. Some optical thickness measurement systems are using the laser optic of to a compact disc drive to sense µm heights. It's a self balancing system, the known actor move gives the measurement.