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Need good study material on Process Technology

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mishrashashi

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Dear all,
I'm searching for some good study matarial for Process technology in ASIC design. Please share some links aur pdf.



Thanks in advance.


Shashi
 

yadavvlsi

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You can refer to any one of these books:
1. VLSI Fabrication Principles by S.K Ghandhi
2. Microelectronic processing by Walter Scot Ruska
3. VLSI Technology by S.M. Sze

I prefer Ghandhi but for beginer Ruska is good.
 

mishrashashi

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Thanks a lot... Ineed some e book for my preparation. Plz suggest...
 

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