[SOLVED] naming rules of ibm tech (astro)

[sicheng163]

hi,
it's my first time to ask for help here, a little awkward...
i've got ibm tech lib from MOSIS, but i am not familiar with the naming rules,
here is my tech file : ibm13_8lm_2thick_3rf.tf
so i know it's 0.13um tech, 8 metals
but i don't know what lm, thick and rt represent for.

Thanks!

 

[randyest]

I haven't worked with IBM process in a while, but I'm pretty sure that:

"lm" = layers of metal, i.e., 8lm = 8 metal layers

The others:

"2thick" = some reference to metal layer thickness. Maybe the top 2 layers are thick (lower resistance / wide wires for global routes?)

"3rf" = sorry I have no idea :?:

I'm sure your MOSIS or IBM support can explain, but probably nothing other than the lm really matters to you if you're doing front-/back-end design.