MIM Capacitor in TSMC90NRF

[skas20]

Hi,

Could somebody throw some light on how TSMCN90RF mim caps are made?
I can see some layers call CBM, CTM etc.. but didn't understand how it will be on silicon.

Thanks,
SK.

 

[panyi]

MIM Capacitor is the capacitor between two metal.
Some layers are dummy layer for MIM Cap.
For example, if the capactior is constructed between M8 and M7, then the M7 density check would exclude the CBM region

 

[skas20]

Panyi, Thanks for the info.

If you can clarify more about the structure it would be great.
For example, my top metal is M6.

I can see layers like CBM,CTM connected to M5 which is the terminals of the CAP.
Are these layers MASK layers?

Thanks,
SK.

 

[Beerkaah]

Check this:
CTM:capacitor top metal, you can connect to it on Your M6
CBM: capacitor bottom metal you can connect to it on your M5

 

[Beerkaah]

Oh sorry, I think I was wrong with the metals !
forget it.
We used to connect top and bot connections to the top metal layer (in your case it is the M6), but it was a different case

 

[panyi]

Hi skas20:

I hope it is helpful for you.

BR