Metal Spacing estimation

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saha.123

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Hi,

What defines the spacing between the metals??The minimum spacing for same metal get increased by increasing the width.On what basis this things defined in PDK??

Thanks in advance
 

I think this has to do with the CMP requirement for maximum metal density. If metal spacing isn't increased with metal width, the local metal density limit would be exceeded.
 

erikl said:
I think this has to do with the CMP requirement for maximum metal density. If metal spacing isn't increased with metal width, the local metal density limit would be exceeded.
Click to expand...

if only it were CMP... it is CMP plus everything else. litho, process control quality, etc.

modern pdks are so complex that there are only a few valid pitches that you can actually use. say, the min pitch is 32n. you can't use 34, 36, 38. 40 works. then 42...56 is forbidden, but 58 works again.
the explanation is that the foundry recipe is tuned to work reliably for the min pitch and maybe a few more. and that's it.
 

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