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mems filter in HFSS, piezoelectric

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cindy.c

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hey,, i found a journal about design of mems filter for wimax. it uses HFSS simulation. i am very interested in doing this design for my final project. It uses CPW and BAR technology. the BAR is composed of piezoelectric material. The problem is, I am a newbie in HFSS and mems..
Can anyone help me how to simulate S parameter of this filter? Thank youu... :D
 

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