The inductive overvoltage is nevertheless very high related to bus voltage. The question is, if you are measuring the voltage correctly. You should also the consider, that the inner chip voltage will be higher than the external one. This is particularly true with a low inductance short, as you have it in your setup.
As another point, Vce should be limited by the operation of the high side diode in a bridge circuit, which can't be seen in your measurement. This can happen even with reasonable bus voltage bypassing if the short inductance is too low, or due unsuitable bypassing.
If it's no an overvoltage induced breakdown, it's a case of too large absorbed energy. But according to the waveforms, the driver is acting on IGBT desaturation with acceptable delay. So I can't see a driver problem in this regard.
I'm not using VLA500-01. My experience is limited to Eupec driver modules and custom designed IGBT drivers. I notice, that the VLA500 has a slow switch-off feature, but doesn't support dynamic clamping. What's your Cs setting?
I would check for sufficient bus voltage bypassing with low inductance "snubber" capacitors and repeat the test with a more realistic short circuit impedance, involving a longer wires.