Lithography process and illumination schemes in the microchip manufacturing process

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shadoweek

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Hi everybody,

Maybe this post has nothing to do with ASIC design, but i didn't know where to post it.

I need any sites or resources where i can obtain some pictures or videos for a presentation about the lithography process and illumination schemes in the microchip manufacturing process.

Also, if any body has something to share or help me with regarding lithography, I'd be very grateful

Thanks in advance
 

Re: lithography

check with clear-shape website or magma website, it's hot topic for 90/65nm now.
 

lithography

you can try howstuffworks.com to get a complete picture of lithographic process.

other sites to try are, fabrication companies like umc, tsmc. to get a design flow, try mosis.org

hope this helps.
 

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