Layer Density Rules_Thermal Conductivity

[MohsenS]

Hello Everybody

I need some information about layout density rules. I want min and max density of different layers.
You might say that it depends on process. But a typical number is required. like numbers in a common process.

Also, I need information about thermal conductivity of materials used in different layers.

Thanks a lot.

 

[deepak242003]

They all varies from process to process .. It is adviced to get those inform from design rule document(DRD).

 

[MohsenS]

They all varies from process to process .. It is adviced to get those inform from design rule document(DRD).

thanks. I googled for some DRD, but didn't find any useful document. can u link or attach an example ?

 

[dick_freebird]

Density rules are based on the particular foundry's litho
capabilities.

Thermal conductivity, I just Google for and pull off whatever
site coughs it up first. But those constants are only part of
the picture, the layer thicknesses are another foundry-
specific bit of information.

 

[MohsenS]

Density rules are based on the particular foundry's litho
capabilities.

Thermal conductivity, I just Google for and pull off whatever
site coughs it up first. But those constants are only part of
the picture, the layer thicknesses are another foundry-
specific bit of information.

i have some information about layer thicknesses.
but thermal conductivity and density ...

 

[Teddy]

usualy poly density is about 15% per die area and metal about 30% - and higher. For min max you really have to pull out the process rules.

 

[MohsenS]

usualy poly density is about 15% per die area and metal about 30% - and higher. For min max you really have to pull out the process rules.

Have you any reference ? paper, report or so.

 

[erikl]

Here's an example for a 0.18µm 5M1P process: