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TCAD-Simulation and Modeling

TCAD-Simulation and Modeling

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Inspect tool error (sentaurus)

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EngAmira

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Hello Everyone

I simulate single fin finfet using sentaurus (Synopsys TCAD ), I did structure , sdevice ,sprocess steps but I've problem in inspect tool I try to use CV command to create curves to such formula but I always get an error couldn't create curve

"

proj_load = n39_nonlocal.plt
------------------------------------------------------------
Error : Cannot create curve""
------------------------------------------------------------

"

while I use command syntax as in the manual

cv_createDS topqmdist "qmnonloc Pos(0,@<tsili-H/2.>@) Distance" "qmnonloc Pos(0,@<tsili+H/2.>@) Distance" (@node@)



could any one advise where is the error
 

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